首页> 外国专利> Integrated circuit including at least six linear-shaped conductive structures forming gate electrodes of transistors with at least two different extension distances beyond conductive contacting structures

Integrated circuit including at least six linear-shaped conductive structures forming gate electrodes of transistors with at least two different extension distances beyond conductive contacting structures

机译:包括至少六个线性导电结构的集成电路,该线性导电结构形成晶体管的栅电极,其具有超过导电接触结构至少两个不同的延伸距离

摘要

A cell of a semiconductor device is disclosed to include a diffusion level including a plurality of diffusion regions separated by inactive regions. The cell also includes a gate electrode level including conductive features defined to extend in only a first parallel direction. Adjacent ones of the conductive features that share a common line of extent in the first parallel direction are fabricated from respective originating layout features that are separated from each other by an end-to-end spacing having a size that is substantially equal across the gate electrode level region and is minimized to an extent allowed by a semiconductor device manufacturing capability. The gate electrode level includes conductive features defined along at least four different virtual lines of extent in the first parallel direction. A width of the conductive features is less than a wavelength of light used in a photolithography process for their fabrication.
机译:公开了一种半导体器件的单元,该单元包括扩散水平,该扩散水平包括被非活性区域分开的多个扩散区域。该单元还包括栅电极层,该栅电极层包括被限定为仅在第一平行方向上延伸的导电特征。在第一平行方向上具有共同的延伸范围线的导电特征中的相邻的导电特征是由各自的原始布局特征制造的,所述各个原始布局特征通过端到端的间距彼此隔开,所述端到端的间距在栅电极上具有基本相等的尺寸在半导体器件的制造能力所允许的程度上最小化了水平区域。栅电极级包括沿第一平行方向上的至少四个不同的虚拟延伸线限定的导电特征。导电部件的宽度小于用于其制造的光刻工艺中使用的光的波长。

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