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Method for measuring thermo-optically induced material phase-change response in a multiple layer thin film structure using visible and ultraviolet spectroscopy
Method for measuring thermo-optically induced material phase-change response in a multiple layer thin film structure using visible and ultraviolet spectroscopy
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机译:用可见和紫外光谱法测量多层薄膜结构中热光诱导材料相变响应的方法
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摘要
A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.
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