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Seal ring for preventing crack propagation in integrated circuit devices
Seal ring for preventing crack propagation in integrated circuit devices
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机译:防止裂纹在集成电路器件中传播的密封圈
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摘要
In one embodiment, an integrated circuit device includes an active area encompassed by a seal ring. The seal ring may include a deep moat formed on an outer edge of the seal ring. The deep moat may have a depth that extends substantially to the substrate to prevent cracks from propagating into the active area. Alternatively or in addition, the seal ring may include redundant vias.
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