PACKAGE FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER MATERIAL IN EUV RADIATION SOURCES.

• 1. EUV辐射源以及EUV辐射产生方法 [P] . 中国专利： CN102823330A . 2012-12-12
• 2. 保护用于产生EUV辐射和/或软X射线的辐射源对抗短路的方法 [P] . 中国专利： CN101199240A . 2008-06-11
• 3. PACKAGE FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER MATERIAL IN EUV RADIATION SOURCES. [P] . NL2004632C2 . 2012-02-20

  机译： 在EUV辐射源中连续产生液态锡作为发射材料的包装。

• 4. ARRANGEMENT FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER MATERIAL IN EUV RADIATION SOURCES. [P] . NL2004632A . 2010-11-09

  机译： 在EUV辐射源中连续产生液态锡作为发射材料的安排。

• 5. Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources [P] . 美国专利： US8154000B2 . 2012-04-10

  机译： 在EUV辐射源中连续生成液态锡作为发射体的安排

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