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CVD FILM MANUFACTURING DEVICE FROM THE ROTATION TYPE FOR MASS PRODUCTION AND METHOD FOR PRODUCING CVD FILM ON THE SURFACE IN A PLASTIC CONTAINER
CVD FILM MANUFACTURING DEVICE FROM THE ROTATION TYPE FOR MASS PRODUCTION AND METHOD FOR PRODUCING CVD FILM ON THE SURFACE IN A PLASTIC CONTAINER
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机译:用于批量生产的旋转式化学气相沉积膜的制造装置以及在塑料容器表面上制备化学气相沉积膜的方法
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摘要
A rotary type CVD film forming apparatus for mass production, wherein a film forming chamber is formed by providing one columnar body having a plurality of housing spaces for housing one plastic container each in one said housing space, a plurality of said film forming chambers is arranged on a rotation support body at equal intervals in a circular state, source gas introduction means serving as an external electrode which introduce a source gas that is converted to plasma inside the plastic containers housed in each of said film forming chambers is provided, and high frequency supply means which supply a high frequency to the external electrode of each of said film forming chambers is provided to form a CVD (chemical vapor growing) film on the internal surfaces of said plastic containers. IMAGE
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