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Method for the contact separation of electrically-conducting layers on the back contacts of solar cells and corresponding solar cells

机译:在太阳能电池和相应的太阳能电池的背面触点上的导电层的接触分离的方法

摘要

A method for production of a solar cell (1), comprising a semiconductor substrate (2), is disclosed, the electrical contact of which is achieved on the back face of the semiconductor substrate. The back face of the semiconductor substrate comprises locally doped regions (3). The adjacent regions (4) have a different doping from said region (3). According to the invention, short-circuiting of the conducting material (5) of the solar cell may be avoided, whereby both regions (3,4), at least at the boundaries (6) thereof, are coated with a thin electrically-insulating layer (7). Both regions (3,4) are then coated over the whole surface thereof with an electrically-conducting material (5). The separation of the electrically-conducting layers (5) is achieved by application of an etching barrier layer (8) to the whole surface, which is then selectively removed without a mask, for example by laser ablation, locally above the insulating layer (7). By the subsequent attack of an etching solution the etching barrier layer (8) is locally removed from the conducting layer (5) in the region of the openings (9).
机译:公开了一种用于制造包括半导体衬底(2)的太阳能电池(1)的方法,其在半导体衬底的背面上实现电接触。半导体衬底的背面包括局部掺杂区域(3)。相邻区域(4)具有与所述区域(3)不同的掺杂。根据本发明,可以避免太阳能电池的导电材料(5)的短路,由此至少在其边界(6)处的两个区域(3,4)都涂覆有薄的电绝缘层。层(7)。然后,两个区域(3,4)在其整个表面上涂覆导电材料(5)。导电层(5)的分离是通过在整个表面上施加蚀刻阻挡层(8)而实现的,然后在绝缘层(7)的局部上方不进行掩模例如通过激光烧蚀将其选择性地去除。 )。通过随后蚀刻溶液的腐蚀,在开口(9)的区域中从导电层(5)局部地去除蚀刻阻挡层(8)。

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