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METHOD FOR PRODUCING A QUARTZ GLASS CRUCIBLE HAVING A TRANSPARENT INNER LAYER MADE OF SYNTHETICALLY PRODUCED QUARTZ GLASS

机译:具有透明合成的石英玻璃内层的石英玻璃坩埚的生产方法

摘要

The aim of the invention is to provide a method for producing a quartz glass crucible which has an inner layer made of transparent, low-void and pure quartz glass and a long service life. Said aim is achieved according to the invention by a method comprising the following steps: (a) providing a crucible main body made of quartz glass having an inner face, (b) generating a porous SiO2 soot layer on at least a portion of the inner face of the crucible main body by means of chemical vapor deposition, drying the porous SiO2 soot layer in order to reduce the hydroxyl group content, and sintering the soot layer to the inner layer made of transparent quartz glass in a low-hydrogen atmosphere, such that a hydroxyl group content of less than 100 ppm by weight develops in the quartz glass of the inner layer.
机译:本发明的目的是提供一种生产石英玻璃坩埚的方法,该石英玻璃坩埚具有由透明,低空隙和纯石英玻璃制成的内层并且使用寿命长。根据本发明,所述目的通过包括以下步骤的方法来实现:(a)提供由具有内表面的石英玻璃制成的坩埚主体,(b)产生多孔SiO 2 烟灰层。通过化学气相沉积在坩埚主体的至少一部分内表面上,干燥多孔SiO 2 烟灰层以减少羟基含量,并将烟灰层烧结成在低氢气氛中,由透明石英玻璃制成的内层,使得内层的石英玻璃中的羟基含量低于100 ppm(重量)。

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