首页> 外国专利> PROCESS FOR PRODUCING A QUARTZ GLASS CRUCIBLE HAVING A TRANSPARENT INNER LAYER OF SYNTHETICALLY PRODUCED QUARTZ GLASS

PROCESS FOR PRODUCING A QUARTZ GLASS CRUCIBLE HAVING A TRANSPARENT INNER LAYER OF SYNTHETICALLY PRODUCED QUARTZ GLASS

机译:具有透明合成的石英玻璃内层的石英玻璃坩埚的生产方法

摘要

The invention is based on the object of specifying a cost-effective process for producing a quartz glass crucible having an inner layer of transparent, synthetically produced quartz glass which is distinguished by a long service life. According to the invention, this object is achieved by a process comprising the following process steps: (a) a gas-permeable crucible substrate having an inner side is produced by solidifying at least the surface of a layer of SiO2 particles, (b) a porous SiO2 soot layer is deposited on at least a partial area of the inner side of the crucible substrate by vapour deposition, and (c) the porous SiO2 soot layer and at least part of the crucible substrate are subjected to vacuum-assisted sintering by means of an arc and under a vacuum which acts over the wall of a vacuum fusion mould, to form the quartz glass crucible and the inner layer of transparent quartz glass.
机译:发明内容本发明的任务是,提出一种成本低廉的制造石英玻璃坩埚的方法,该石英玻璃坩埚具有透明的,合成的石英玻璃内层,该石英玻璃坩埚的使用寿命长。根据本发明,该目的通过一种包括以下工艺步骤的工艺来实现:(a)通过至少固化SiO 2层的表面来生产具有内侧的透气性坩埚基板。 Sub>颗粒,(b)通过气相沉积在坩埚基板内侧的至少一部分区域上沉积多孔SiO 2 烟灰层,和(c)多孔SiO 2 烟灰层和至少一部分坩埚基体借助电弧在真空下烧结,该电弧作用在真空熔模的壁上,从而形成石英玻璃坩埚和石英玻璃坩埚。透明石英玻璃的内层。

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