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A THERMAL MICROACTUATOR FOR A SUSPENSION ARM OF A HARD DISK DRIVE AND A METHOD OF FABRICATING THE THERMAL MICROACTUATOR
A THERMAL MICROACTUATOR FOR A SUSPENSION ARM OF A HARD DISK DRIVE AND A METHOD OF FABRICATING THE THERMAL MICROACTUATOR
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机译:用于硬盘驱动器的悬架臂的热微致动器和制造该热微致动器的方法
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摘要
A thermal microactuator for micropositioning a slider on a suspension arm of a hard disk drive, the slider being attached to a flexure, the flexure supporting a conducting layer under a cover layer, the thermal microactuator comprising at least one microactuating beam formed on the flexure under the cover layer. A method of fabricating a thermal microactuator for a suspension arm of a hard disk drive, the suspension arm comprising a slider attached to a flexure, the method comprising forming at least one microactuating beam on the flexure during fabrication of the suspension arm before attaching the slider to the flexure; and laying a cover layer over the at least one microactuating beam.
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