Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane mems device

摘要

A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods determine linear acceleration and rotation in the in-pane and out-of-plane directions of the MEMS inertial sensor. An out-of-plane linear acceleration of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode pair. An in-plane rotation of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode. An in-plane linear acceleration of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. An out-of-plane rotation of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb.