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IMAGE PROCESSING METHOD FOR THE ANALYSIS OF INTEGRATED CIRCUITS, AND SYSTEM FOR IMPLEMENTING SAID METHOD
IMAGE PROCESSING METHOD FOR THE ANALYSIS OF INTEGRATED CIRCUITS, AND SYSTEM FOR IMPLEMENTING SAID METHOD
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机译:用于综合电路分析的图像处理方法及实施方法
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摘要
The invention relates to an image-processing method for analyzing defects in an integrated electronic circuit (24) using acquisition data from measuring isolated photons emitted by the circuit (24), including a first step of filtering the detected photons (208) using weights corresponding to a space and/or time correlation step (206) and allocated to each respective photon. The processing method further includes at least one basic step (716) of arranging the photons located in a window (Fev(k)) in groups about a predetermined central photon (k) in an event (ev(k)) characterized by an event position and an event weight Wev(k) equal to the sum of the weights of all the photons contained in the window Fev(k).
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