Electrostatic actuator of a mobile structure with improved relief of trapped charges

摘要

The actuator has first and second actuating bumps (5, 6) made of electrically conducting material e.g. doped semiconductor material, and provided with respective contact surfaces. An electrostatic actuating circuit (7) moves the bumps with respect to one another. A positive ion source does not contain water vapor. An electrically insulating film (8) assures electric insulation between the bumps and comprises an interface with the positive ion source. The film is permeable to positive ions. The second bump is covered by an additional electrically insulating film. The positive ions are selected from hydrogen, lithium, sodium, potassium and calcium ions. The positive ion source is formed by a porous material filled with liquid or gaseous material releasing the positive ions.