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Experimental dynamic trapping of electrostatically actuated bistable micro-beams

机译:静电驱动双稳态微束的实验动态陷获

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摘要

We demonstrate dynamic snap-through from a primary to a secondary statically inaccessible stable configuration in single crystal silicon, curved, doubly clamped micromechanical beam structures. Nanoscale motion of the fabricated bistable micromechanical devices was transduced using a high speed camera. Our experimental and theoretical results collectively show, that the transition between the two stable states was solely achieved by a tailored time dependent electrostatic actuation. Fast imaging of micromechanical motion allowed for direct visualization of dynamic trapping at the statically inaccessible state. These results further suggest that our direct dynamic actuation transcends prevalent limitations in controlling geometrically non-linear microstructures, and may have applications extending to multi-stable, topologically optimized micromechanical logic and non-volatile memory architectures.
机译:我们演示了在单晶硅,弯曲的,双重夹持的微机械梁结构中,从主静态到动态静态无法访问的稳定配置的动态捕捉。所制造的双稳态微机械装置的纳米级运动是使用高速相机进行的。我们的实验和理论结果共同表明,两个稳定状态之间的过渡仅通过量身定制的时间相关静电致动来实现。微机械运动的快速成像允许在静态不可访问状态下直接观察动态陷井。这些结果进一步表明,我们的直接动态致动超越了控制几何非线性微结构的局限性,并且可能具有扩展到多稳态,拓扑优化的微机械逻辑和非易失性存储体系结构的应用。

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