HYDROGEN SENSOR AND METHOD OF MANUFACTURING THE SAME CAPABLE OF ENSURING EXCELLENT SENSITIVITY AND ENHANCING A RESPONSE TIME AND A RECOVERY TIME

摘要

PURPOSE: A hydrogen sensor and a method of manufacturing the same are provided to minimize power consumption minimizing the size of a sensor and lower a manufacturing cost due to a simple manufacturing process.;CONSTITUTION: A hydrogen sensor comprises a silicon substrate(10), an insulating layer(20), a heater, an electrode(30), a protective layer(40), and a catalyst layer(50). The insulating later is deposited on the surface of the substrate. The heater and the electrode are formed on the insulating layer. The protective layer is formed on the heater and the protective layer without the heater. The protective layer isolates the heater from the electrode. The catalyst layer connects electrodes on the protective layer. An adhesive layer is formed among the insulating layer, the heater and the electrode.;COPYRIGHT KIPO 2012