首页> 外国专利> PROCESS FOR PREPARING GRAPHENE NANO RIBBON AND GRAPHENE NANO RIBBON PREPARED BY THE SAME

PROCESS FOR PREPARING GRAPHENE NANO RIBBON AND GRAPHENE NANO RIBBON PREPARED BY THE SAME

机译:制备石墨烯纳米碳带的方法和由石墨烯纳米碳带制备的石墨烯纳米碳带

摘要

PURPOSE: A method for manufacturing a graphene nano-ribbon and the graphene nano-ribbon manufactured by the same are provided to cost effectively manufacture the graphene nano-ribbon without a high vacuum machine or an expensive machine. CONSTITUTION: A method for manufacturing a graphene nano-ribbon includes the following: A sheet-shaped graphene is formed on at least one side of a substrate. A plasma mask with nano-patterns is formed on the graphene. The nano-patterns are formed on the graphene by implementing a plasma treating process with respect to the stacked body with the plasma mask. The plasma mask forming process includes an amorphous carbon stacking process and a nano-pattern forming process with respect to amorphous carbon. After the nano-patterns are formed on the graphene, the plasma mask is eliminated.
机译:目的:提供一种用于制造石墨烯纳米带的方法和由其制造的石墨烯纳米带,以在不使用高真空机器或昂贵机器的情况下经济有效地制造石墨烯纳米带。构成:石墨烯纳米带的制造方法包括以下步骤:在基板的至少一侧上形成片状石墨烯。在石墨烯上形成具有纳米图案的等离子体掩模。通过对具有等离子体掩模的堆叠体实施等离子体处理工艺,在石墨烯上形成纳米图案。等离子体掩模形成工艺包括相对于非晶碳的非晶碳堆叠工艺和纳米图案形成工艺。在石墨烯上形成纳米图案之后,消除等离子体掩模。

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