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IMPRINTING DEVICE AND IMPRINTING METHOD USING THE SAME FOR REDUCING THE PROCESS COST
IMPRINTING DEVICE AND IMPRINTING METHOD USING THE SAME FOR REDUCING THE PROCESS COST
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机译:一种用于降低工艺成本的浸染装置及浸染方法
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摘要
PURPOSE: The flatness of the stage does not go mad influence on the process for forming pattern, the stains created in substrate diminishes.;CONSTITUTION: An imprinting device(1) comprises a chamber unit(2), a stage(3), a mounting member(4), and a jetting unit(5). The chamber unit enforces the process forming the pattern in a substrate(10). The stage supports a substrate having resin layer(11). In order that the mounting member is located in the upper of the stage, it is installed in the chamber unit. A mold member(20) is attached to the mounting member. The pattern is formed in the substrate, the molded member metamorphoses the resin layer. The fluid for separating the substrate supported to the stage, from the stage is of resentment died. The molded member and resin layer are touched. The mounting member transfers the nearly molded member in the substrate separating.;COPYRIGHT KIPO 2012
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