HIGH MAGNETIC FIELD ECR ION SOURCE SYSTEM FOR EXTRACTING MULTI-CHARGED ION BEAMS

摘要

PURPOSE: A high magnetic field ECR(Electron Cyclotron Resonance) ion source system is provided to be applied to various experiments by implementing multi-charged ion beams of various elements using one ion source.;CONSTITUTION: An ECR ion source supplies a micro wave by generating ECR plasma. An ECR container receives the ECR ion source. A magnet bundle(14) receives the ECR container and is composed of 6 polar permanent magnet. An electromagnet(13) is formed outside the magnet bundle and forms an axial magnetic field. A high voltage insulation structure is composed of a cylindrical insulation layer between the magnet bundle and the electromagnet. A beam output unit(16) outputs an ion from the ECR ion source.;COPYRIGHT KIPO 2012