PHOTO DIODE WHICH INCLUDES A SURFACE PLASMON COUPLER FOR IMPROVING COLLECTION RATE OF A PHOTON PROJECTED ON A PHOTON RECEIVING SURFACE

摘要

PURPOSE: A photo diode which includes a surface Plasmon coupler is provided to increase optical power supplied to a signal generation unit, thereby improving photo conversion efficiency.;CONSTITUTION: A signal generation unit(110) comprises an anti-reflective layer(130) located on a photon receiving surface(110a). The signal generation unit comprises insulating layers(112a,112b) on one part of an i-type upper surface part and/or a p-type upper surface part. A surface Plasmon coupler(120) is located on the photon receiving surface of the signal generation unit. Two or more metal structures(121,122) are included in the surface Plasmon coupler.;COPYRIGHT KIPO 2012