ROLL MOLD CAPABLEOF PREVENTING SIZE DEFORMATION OF THE ROLL MOLD DUE TO AN ETCHING PROCESS, A MANUFACTURING METHOD AND APPARATUS THEREOF, AND A MANUFACTURING METHOD OF A THIN FILM PATTERN

摘要

PURPOSE: A roll mold, a manufacturing method and apparatus thereof, and a manufacturing method of a thin film pattern are provided to reduce process reducing and manufacturing costs by forming the roll mold through coating and transferring processes without an etching process.;CONSTITUTION: A substrate(101) in which a master pattern layer is formed is prepared. A flat board mold is prepared by successively forming a mold surface layer(146) and a solid buffer layer(148) on the substrate. A adhesive resin layer(142) is formed on a base roller(144) arranged on the upper side of the flat board mold. The flat board mold is attached on the base roller through the adhesive resin layer. The surface of the master pattern layer which contacts with the mold surface layer is treated by self assembly monomolecular materials.;COPYRIGHT KIPO 2012