PROBE MANUFACTURING METHOD WHICH IS SET TO AN ARRANGEMENT OF AN INPUT/OUTPUT TERMINAL OF A DEVICE UNDER TEST, A PROBE STRUCTURE, A PROBE APPARATUS, AND A TESTING APPARATUS

摘要

PURPOSE: A probe manufacturing method, a probe structure, a probe apparatus, and a testing apparatus are provided to arrange a probe according to an arrangement of an input/output terminal of a device under test.;CONSTITUTION: A probe structure(100) comprises a contact point(110), a probe main body(120), a probe pad part(130), a conductive layer(140), an insulation part(160), and a picker adsorption part(170). The contact part is physically and electrically connected to an input/output terminal of a device under test in order to transmit an electric signal to the device. The probe main body forms the contact part. The probe pad part is electrically connected to the contact part. The conductive layer electrically connects the contact part and the probe pad part. A bonding wire is electrically connected to the probe pad part by bonding one end of the bonding wire on the probe pad part. The insulation part is installed on the probe main body and insulates the bonding wire and the probe main body. The picker adsorption part is installed in order to be adsorbed by a picker which is maintained by adsorbing the probe structure.;COPYRIGHT KIPO 2012