TEST HANDLER FOR A SEMICONDUCTOR DEVICE AND A TEST METHOD USING THE SAME, CAPABLE OF REMOVING ABNORMAL MATERIALS DURING THE OPERATION OF A TEST HANDLER

摘要

PURPOSE: A test handler for a semiconductor device and a test method using the same are provided to improve test yield and the productivity and make stable test contact by removing foreign materials existing in a test tray.;CONSTITUTION: A loader unit(600) supplies a semiconductor package to be tested. An unloader unit(700) unloads the semiconductor package whose test is completed. A soak chamber(200) pre-heats or pre-cools the semiconductor package to predetermined temperature. A test chamber(300) tests the semiconductor package loaded to the test tray. A discharge chamber(400) returns the semiconductor package whose test is completed to the initial normal temperature state. The test tray cleaning unit(800) cleans the test tray.;COPYRIGHT KIPO 2012