ELECTROSTATIC CHUCK WHICH USES AN ALUMINUM OXIDE FILM CAPABLE OF IMPROVING EQUIPMENT EFFICIENCY BY EXTENDING THE LIFETIME OF A SHOWER HEAD

摘要

PURPOSE: An electrostatic chuck which uses an aluminum oxide film is provided to secure stability of an electrode in a high temperature condition by forming the electrode with an anodizing film.;CONSTITUTION: An electrostatic chuck has an aluminum electrode and an aluminum-anodizing surface. An anodizing film which is manufactured by oxidation forms an electrode which receives DC power and an electrode which receives process power. A shower head uniformly induces a flow of process gas which used in dry type plasma equipment to plasma space. The process gas flows into a region which generates plasma by passing through a hole formed on the shower head.;COPYRIGHT KIPO 2012