VACUUM DEPOSITION APPARATUS CAPABLE OF EFFECTIVELY PREVENTING PARTICLES DUE TO DEPOSITION MATERIALS

摘要

PURPOSE: A vacuum deposition apparatus is provided to facilitate a vacuum deposition process by varying the motion patterns of a substrate dome.;CONSTITUTION: A vacuum deposition apparatus(100) comprises a substrate dome revolving motor(110), a substrate dome revolving shaft(111), a substrate dome rotating motor(150), a substrate dome rotating shaft(151), a pair of substrate dome joining hands(180). The substrate dome revolving shaft is connected to the substrate dome revolving motor and is rotated by the operation of the substrate dome revolving motor. The substrate dome rotating motor is separated from the substrate dome revolving motor. The substrate dome rotating shaft is inserted into the substrate dome revolving shaft in a non contact state. The substrate dome rotating shaft is connected to the substrate dome rotating motor and is rotated by the operation of the substrate dome rotating motor. If the substrate dome revolving shaft revolves with the operation of the substrate dome revolving motor, the substrate dome joining hand rotates around the substrate dome revolving shaft to rotate a substrate dome(190). If the substrate dome rotating shaft rotates with the operation of the substrate dome rotating motor, the substrate dome rotating shaft rotates the substrate dome.;COPYRIGHT KIPO 2012