MASKLESS EXPOSING APPARATUS AND AN EXPOSING METHOD CAPABLE OF IMPROVING THE ILLUMINANCE UNIFORMITY OF EXPOSED PATTERNS BY INSERTING A DOSE CONTROLLING FILTER AT THE PRE-SET POSITION OF AN OPTICAL SYSTEM

摘要

PURPOSE: A maskless exposing apparatus and an exposing method are provided to precisely implement an exposing process although the repeated scanning number of the maskless exposing apparatus is reduced.;CONSTITUTION: A maskless exposing apparatus includes a light illuminating part(102), a space photo-modulator(104), a beam expander(106), a micro lens array(108), and a projection lens(110). The space photo-modulator receives light from the light illuminating part and emits light with pre-set patterns. The beam expander expands light emitted from the space photo-modulator. The micro lens array separates the expanded light into a plurality of light and collects the separated light. A dose controlling filter(107) is arranged between the space photo-modulator and the beam expander or between the beam expander and the micro lens array.;COPYRIGHT KIPO 2012