FUNCTION-GRADIENT INORGANIC RESIST, SUBSTRATE WITH FUNCTION-GRADIENT INORGANIC RESIST, CYLINDRICAL SUBSTRATE WITH FUNCTION-GRADIENT INORGANIC RESIST, METHOD FOR FORMING FUNCTION-GRADIENT INORGANIC RESIST, METHOD FOR FORMING FINE PATTERN, AND INORGANIC RESIST AND PROCESS FOR PRODUCING SAME

摘要

If the laser has the opposite to the main surface and the main surface is irradiated , the heat change by state in the functional gradient type inorganic resist , the resist features inclined arms comprises a single-layer resist, and is changed from the main surface at least a composition of the single-layer resist in a row through to the back side , in the single-layer resist , topical typically laser anisotropy of the region to reach a predetermined temperature when the irradiation is increased continuously toward the back side from the main surface . ;