POSITION ALIGNMENT DEVICE, POSITION ALIGNMENT METHOD, AND COMPUTER READABLE RECORDING MEDIUM HAVING POSITION ALIGNMENT PROGRAM RECORDED THEREON

摘要

PURPOSE: A position aligning device, a position aligning method, and a computer readable recording medium having position aligning program are provided to control an increase of a testing time by reducing a searching time for a position alignment of a testing object even though images photographed is out of a testing area. CONSTITUTION: A position aligning device comprises a photographing unit, a memory unit, a searching unit(24), a calculation unit(25), and a control unit. The memory unit comprises a high-resolution recipe image photographed by the photographing unit and a view field area of the high-resolution recipe image and memorizes a low-resolution recipe image photographed by the photographing unit. The searching unit searches a position of a testing image for testing photographed by the photographing unit and the low-resolution recipe image at a same diameter with the high-resolution recipe image. When a measurement section is out of the view field area of the testing image based on a result of the searching, the calculation unit calculates position information including a position of measurement section and the testing image. The control unit moves the photographing unit so that the measurement section can be in the view field area of the testing image and the photographing unit photographs the testing image.