ORTHO-NITROBENZYL ESTER COMPOUND HAVING ABILITY RESTRAINING THE DISSOLUTION OF AN ALKALI-DEVELOPABLE RESIN IN NON-EXPOSURE PART, AND A POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION COMPRISING THE SAME

摘要

PURPOSE: An ortho-nitrobenzyl ester compound is provided to restrain the dissolution of non-exposure part, and to provide a positive type photosensitive resin composition with excellent sensitivity, resolution, pattern formation, and removal of residue.;CONSTITUTION: An ortho-nitrobenzyl ester compound comprises a compound in chemical formula 1. In chemical formula 1, R^1 and R^2 is respectively and independently C1-20 aliphatic organic group, or a substituted or unsubstituted cycloaliphatic organic group, R^3 and R^4 is respectively and independently single bond, or substituted or unsubstituted divalent C1-20 aliphatic organic group, and Z^1 and Z^2 is respectively and independently a hydroxy group, an amine group, a carboxy group, or an aldehyde group, n1 and n2 is respectively and independently an integer from 0-5, and n1+n2 is an integer from 1-5.;COPYRIGHT KIPO 2012