首页> 外国专利> PHOTO-SENSITIVE RESIN COMPOSITION FOR A DRY FILM PHOTORESIST CAPABLE OF IMPROVING PLATING AND ETCHING CHARACTERISTICS BY INCLUDING THE COPOLYMER OF DIENE MONOMER AND ACYLIC ACID

PHOTO-SENSITIVE RESIN COMPOSITION FOR A DRY FILM PHOTORESIST CAPABLE OF IMPROVING PLATING AND ETCHING CHARACTERISTICS BY INCLUDING THE COPOLYMER OF DIENE MONOMER AND ACYLIC ACID

机译:干膜光致抗蚀剂的光敏树脂成分,可通过掺入二烯单体和丙烯酸的共聚物来改善镀层和蚀刻特性

摘要

PURPOSE: A photo-sensitive resin composition for a dry film photoresist is provided to improve the chemical resistance characteristic of cured products.;CONSTITUTION: A photo-sensitive resin composition for a dry film photoresist includes a photopolymerizable multi-functional monomer, a photo-polymerization initiator, and a polymer binder. The photo-sensitive resin composition includes the copolymer of diene monomer and acrylic acid. The copolymer is represented by chemical formula 1. In chemical formula 1, R1 to R3 are respectively hydrogen elements and C1 to C5 alkyl groups; the weight ratio of m:n is 10-90:10-90. The weight average molecular weight of the copolymer is in a range between 10,000 and 150,000.;COPYRIGHT KIPO 2012
机译:目的:提供一种用于干膜光致抗蚀剂的光敏树脂组合物,以改善固化产物的耐化学性。;组成:一种用于干膜光致抗蚀剂的光敏树脂组合物,包括光聚合性多功能单体,聚合引发剂和聚合物粘合剂。光敏树脂组合物包含二烯单体和丙烯酸的共聚物。该共聚物用化学式1表示。在化学式1中,R 1至R 3分别为氢元素和C 1至C 5烷基。 m:n的重量比为10-90:10-90。共聚物的重均分子量在10,000和150,000之间。; COPYRIGHT KIPO 2012

著录项

  • 公开/公告号KR20120076128A

    专利类型

  • 公开/公告日2012-07-09

    原文格式PDF

  • 申请/专利权人 KOLON INDUSTRIES INC.;

    申请/专利号KR20100138153

  • 发明设计人 LEE BYEONG IL;HAN KOOK HYUN;JHO SEUNG JE;

    申请日2010-12-29

  • 分类号G03F7/027;G03F7/004;

  • 国家 KR

  • 入库时间 2022-08-21 17:09:35

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