SIC COATING DEVICE FOR GRAPHITE PEBBLES AND A METHOD FOR COATING THE GRAPHITE PEBBLES, CAPABLE OF FORMING A SIC THIN FILM INTO THE UNIFORM THICKNESS

摘要

PURPOSE: A SiC(Silicon Carbide) coating device for graphite pebbles and a method for coating the graphite pebbles are provided to improve mechanical characteristics of an SiC thin film formed in graphite pebbles because the Sic thin film is coated in the state of a crystalline structure.;CONSTITUTION: A SiC coating device(1) for graphite pebbles comprises a vacuum chamber(10), a SiC target unit(11), a pebble accommodating unit(12), and a rotating stir bar(131). The vacuum chamber forms a vacuum state. The Sic target unit is installed in the inside of the vacuum chamber and generates Sic particles being coated on graphite pebbles. The pebble accommodating unit accommodates the graphite pebbles. The rotating stir bar is install in the inside of the pebble accommodating unit to be rotated. The rotating stir bar rolls the graphite pebbles while coating by applying the external force to the graphite pebbles so that the graphite pebbles are uniformly coated.;COPYRIGHT KIPO 2012