MANUFACTURING METHOD OF NANO-PARTICLES ON CARBON NANO-TUBE FOREST CAPABLE OF INCREASING GROWTH RATE OF THE NANO-PARTICLES

摘要

PURPOSE: A manufacturing method of nano-particles on carbon nano-tube forest is provided to have uniform diameter on the carbon nano-tube forest by using an atomic layer deposition.;CONSTITUTION: A manufacturing method of nano-particles on carbon nano-tube forest comprises the following steps: growing the carbon nano-tube forest on wafer; and performing the atomic layer deposition of the metal oxide in the carbon nanotube forest by using reactive gas and precursor. The carbon nano-tube forest has deformity or impurities on the surface. The carbon nano-tube forest is a single-walled carbon nano-tube(SWCNT) forest. The manufactured nano-particles have a botryoidally shape. The first step comprises the following steps: evaporating aluminum(Al) thin film from the silicon wafer; evaporating an iron(Fe) super-thin film from the aluminum(Al) thin film; and growing the carbon nano-tube in a chemical vapor deposition(CVD) method which use water on the iron (Fe) super-thin film.;COPYRIGHT KIPO 2012