METHOD FOR MANUFACTURING A CNT-METAL COMPOSITE FILM FOR FIELD EMISSION AND AN AEROSOL DEPOSITION APPARATUS

摘要

PURPOSE: A manufacturing method of a CNT(Carbon Nano Tube)-metal composite film for field emission and an aerosol deposition apparatus are provided to prevent CNT-metal composite powder accumulated in corners of an aerosol chamber by rotating a magnet rotor coupled to the inner bottom of the aerosol chamber.;CONSTITUTION: A manufacturing method of a CNT-metal composite film for field emission comprises the steps of: applying mechanical impact energy to CNT-metal composite powder, leading the pre-treated CNT-metal composite powder to an aerosol chamber, spraying carrier gas directly to the CNT-metal composite powder to obtain aerosol while rotating a magnet rotor in order to prevent the accumulation of the CNT-metal composite powder on the bottom of the aerosol chamber, and accelerating and discharging the aerosol through a transport tube into a deposition chamber using vacuum expansion so that the aerosol is deposited on a substrate.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Aerosol layer mainly composed of CNT; (BB) Aerosol layer mainly composed of Ag; (CC) CNT-Ag mixed powder; (DD) Case of not performing pretreatment on CNT-Ag mixed powder; (EE) Aerosol of evenly mixed CNT-Ag powder; (FF) Case of performing pretreatment on CNT-Ag mixed powder