IMPRINT DEVICE AND A METHOD FOR MANUFACTURING PRODUCT, CAPABLE OF ELIMINATING FOREIGN MATERIALS EXISTING ON A SUBSTRATE HOLDING SURFACE OR A MOLD HOLDING SURFACE

摘要

PURPOSE: An imprint device and a method for manufacturing product are provided to prevent projection failure and the flatness of a substrate becoming worse by eliminating foreign materials from a substrate holding surface holding the substrate.;CONSTITUTION: An imprint device comprises a substrate holding unit(4), a mold holding unit(3), a mold driving device(5), and a controlling unit(20). The mold holding unit holds a mold with a mold holding surface. The mold driving device relatively moves the substrate holding unit with respect to the mold holding unit. The controlling unit controls the mold driving device so that the substrate hold unit is moved relatively with respect to the mold holding unit while a cleaning member and the mold holding surface are touched.;COPYRIGHT KIPO 2013