首页> 外国专利> FOREIGN MATTER ELIMINATING DEVICE, SUBSTRATE HOLDING DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND METHOD FOR REMOVING FOREIGN MATTER

FOREIGN MATTER ELIMINATING DEVICE, SUBSTRATE HOLDING DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND METHOD FOR REMOVING FOREIGN MATTER

机译:异物消除装置,基板保持装置,光电装置的制造方法以及异物消除方法

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter eliminating device and a substrate holding device which thoroughly eliminates foreign matter stuck onto the surface of a substrate and reduces dusting from a wiping cloth and re-sticking of eliminated foreign matter, and to provide a manufacturing method of an electro-optical device using these devices and a method for eliminating foreign matter.;SOLUTION: The foreign matter eliminating device 100 is provided with the substrate holding device 101 which supports a liquid crystal display panel 1 by holding FPC (flexible printed circuit) 7 from both surfaces and which holds and moves the liquid crystal display panel 1 with the surface 3a facing downward, and a cloth supply mechanism 111 which supplies a wiping cloth 10, arranged facing the surface 3a. It is also provided with a pressing part 115 supporting the wiping cloth 10 from the lower surface and a dispenser 124 coating the surface of the wiping cloth 10 with a solvent, and further provided with a controller which activates wiping-out action for eliminating foreign matter by moving the liquid crystal display panel 1 in the state of pressing the wiping cloth 10 onto the surface 3a by the pressing part 115.;COPYRIGHT: (C)2007,JPO&INPIT
机译:解决的问题:提供一种异物消除装置和基板保持装置,其可以彻底消除粘附在基板表面上的异物,并减少擦拭布上的灰尘和重新粘附消除的异物,并提供制造方法。解决方法:异物消除装置100具有基板保持装置101,该基板保持装置101通过保持FPC(柔性印刷电路)来支撑液晶显示面板1。 )7是从两个表面上拉出的,其以使表面3a朝下的方式保持和移动液晶显示面板1,以及布供应机构111,该布供应机构111以面对表面3a的方式供应擦拭布10。还设置有从下表面支撑擦拭布10的按压部分115和用溶剂覆盖擦拭布10的表面的分配器124,并且还设置有控制器,该控制器激活擦拭动作以消除异物。在按压部件115将擦拭布10按压在表面3a上的状态下,通过使液晶显示面板1移动来进行保护。(C)2007,JPO&INPIT

著录项

  • 公开/公告号JP2006272223A

    专利类型

  • 公开/公告日2006-10-12

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20050097570

  • 发明设计人 YOSHIE TAKESHI;

    申请日2005-03-30

  • 分类号B08B1/00;G02F1/13;H01L21/304;

  • 国家 JP

  • 入库时间 2022-08-21 21:57:23

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号