FOREIGN MATTER ELIMINATING DEVICE, SUBSTRATE HOLDING DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND METHOD FOR REMOVING FOREIGN MATTER

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter eliminating device and a substrate holding device which thoroughly eliminates foreign matter stuck onto the surface of a substrate and reduces dusting from a wiping cloth and re-sticking of eliminated foreign matter, and to provide a manufacturing method of an electro-optical device using these devices and a method for eliminating foreign matter.;SOLUTION: The foreign matter eliminating device 100 is provided with the substrate holding device 101 which supports a liquid crystal display panel 1 by holding FPC (flexible printed circuit) 7 from both surfaces and which holds and moves the liquid crystal display panel 1 with the surface 3a facing downward, and a cloth supply mechanism 111 which supplies a wiping cloth 10, arranged facing the surface 3a. It is also provided with a pressing part 115 supporting the wiping cloth 10 from the lower surface and a dispenser 124 coating the surface of the wiping cloth 10 with a solvent, and further provided with a controller which activates wiping-out action for eliminating foreign matter by moving the liquid crystal display panel 1 in the state of pressing the wiping cloth 10 onto the surface 3a by the pressing part 115.;COPYRIGHT: (C)2007,JPO&INPIT