PERISTALTIC MICROPUMP DRIVEN BY SINGLE CONTROL SIGNAL AND METHOD FOR FABRICATING THE SAME

摘要

is linked micro- pump for transferring the working fluid in the working fluid channel is disclosed in accordance with the present invention . -Linked micro- pump according to the invention is disposed adjacent to the working fluid channel , a plurality of actuators having a circular shape ; At least one connection channel connecting the plurality of the actuators in series; Each connected to the actuator at each end of the plurality of actuators connected in series with one, two ports ; And is disposed between the operating fluid channel and the plurality of actuators , is in accordance with the pressure change of the plurality of actuators include a plurality of elastic deformation of the diaphragm area to feed the working fluid . ;