MANUFACTURING PROCESS OF ELEMENT INCLUDE METAL FILM HAVING NANO-SCALE APERTURE, NANO-SCALE ELEMENT, OPTICAL LENS AND PLASMONIC OPTICAL HEAD MANUFACTURED THE METHOD

摘要

PURPOSE: A method for manufacturing an element formed with a metal film having a nano opening inside, a nano element manufactured by the same, an optical lens, and a plasmonic optical head are provided to enable the formation of a nano-sized geometric base plate and a nano opening into the desired shape to the desired depth. CONSTITUTION: A sacrificial layer is formed on the surface of an object(S2). A first metal thin film layer is laminated on the sacrificial layer(S3). A focused ion beam passes through the first metal thin film layer and the sacrificial layer, and a groove is formed in the object(S4). A metal layer is reformed on one side of the object, and a second metal thin film layer is formed inside the groove(S5). The sacrificial layer is removed from the surface of the object(S6).