SURFACE ANALYSIS APPARATUS OF THERMAL ANNEALED SAMPLE AND SURFACE ANALYSIS METHOD OF THERMAL ANNEALED SAMPLE USING THE APPARATUS

摘要

PURPOSE: A surface analysis apparatus and method for a thermal annealed sample are provided to directly analyze the surface of a heated or cooled sample without contact with air, thereby improving the reliability of analysis. CONSTITUTION: A surface analysis apparatus and method for a thermal annealed sample comprises a preparation chamber(110), a thermal annealing/analysis chamber(120), a transfer unit(130a), a transfer pipe(140), and a gate(150). The preparation chamber comprises a door(111) for putting in a sample(101) and a holder(112) for fixing the sample. The thermal annealing/analysis chamber comprises an X-ray photoelectron analyzer for analyzing the surface of the sample. The transfer unit transfers the holder with the sample between the preparation chamber and the thermal annealing/analysis chamber. The transfer pipe is a tunnel for connecting the preparation chamber and the thermal annealing/analysis chamber. The gate is arranged in the central part of the transfer pipe and opened only when transferring the sample.