SECTIONAL TYPE GAS DISTRIBUTION MODULE WITH EXCELLENT GAS DISTRIBUTING UNIFORMITY

摘要

PURPOSE: A compartment type gas distributing module is provided to improve gas injection uniformity toward the whole portion of a wafer by installing a gas flux controller controlling the flow rate of process gas. CONSTITUTION: A gas distribution plate(160) comprises a plurality of gas injection holes(162). An air curtain(165) is installed between a chamber(110) and the gas distribution plate. The gas distribution plate is installed at the upper side of the chamber. The air curtain divides the plurality of gas injection holes into a plurality of partition areas(DA). The air curtain comprises a plurality of protrusions on the sidewall for expanding area of a surface. A gas supply pipe(166) is connected to the plurality of partition areas. A gas flux controller(168) controls the flow rate of process gas provided to the plurality of partition areas.