GAS DISTRIBUTION MODULE HAVING AN ELLIPTICAL FLOW PATH FOR SUCCESSIVELY PROVIDING DIFFERENT KINDS OF DEPOSITION GASES AND AN UPRIGHT TYPE DEPOSITION APPARATUS INCLUDING THE GAS DISTRIBUTION MODULE

摘要

PURPOSE: A gas distribution module having an elliptical flow path and an upright type deposition apparatus including the gas distribution module are provided to locate a substrate to be deposited in an upright position, thereby improving spatial efficiency of a deposition apparatus.;CONSTITUTION: A gas distribution module of a deposition apparatus for a flat panel display comprises a housing(131) and gas path units(310,320,330). The gas path units are formed inside the housing to form flow paths providing different kinks of deposition gases, where the flow paths are formed in an elliptical shape and include cam units(315,325). The gas path units include a first gas path unit providing precursor gas and a second gas path unit providing reactance gas. The gas distribution module accommodates a substrate in an upright position to form a thin film on the substrate.;COPYRIGHT KIPO 2012