首页> 外国专利> An Apparatus For Measuring Geometric Error of Index Table in Machine Tool Using Laser Interferometer And Method Thereof

An Apparatus For Measuring Geometric Error of Index Table in Machine Tool Using Laser Interferometer And Method Thereof

机译:用激光干涉仪测量机床分度台几何误差的装置及其方法

摘要

The present invention using a laser interferometer for measuring the geometric errors of the index table which is mounted on the machine tool relates to the measuring apparatus and method, provided at the upper part of the index table and the index table and the rotation angle by rotating the same in the opposite direction, each calibration unit, the rotating optical system is installed on the upper portion of each of the calibration unit, the index table and spaced positioned and fixedly installed on a laser beam by the optical system and analyze the phase difference by the laser transceiver and the optical path difference of the laser received by the laser receiving portion for receiving the laser reflected from the optical geometry of the index table by is configured to include a calculation of measuring the error. ; According to the present invention as described above, the location and resolution of the linear primary drive shaft and a device for measuring the rotation angle error of the laser interferometer for measuring the rotational drive shaft there is an effect in combination with the precise measurement of the geometric errors of the index table and can be described by the world coordinate system to geometric errors of machine tools.
机译:使用激光干涉仪来测量安装在机床上的分度台的几何误差的本发明涉及一种测量设备和方法,其设置在分度台和分度台的上部并且通过旋转而旋转角度在相反的方向上相同,每个校准单元,旋转光学系统安装在每个校准单元的上部,分度台并通过光学系统间隔固定并固定安装在激光束上,并分析相位差由激光收发器和由激光接收部分接收的激光的光程差,该激光接收部分用于接收由分度台的光学几何形状反射的激光,包括测量误差的计算。 ;根据如上所述的本发明,线性初级驱动轴的位置和分辨率以及用于测量用于测量旋转驱动轴的激光干涉仪的旋转角误差的测量装置具有与精确测量线性驱动轴相结合的效果。索引表的几何误差,可以用世界坐标系描述为机床的几何误差。

著录项

  • 公开/公告号KR101159644B1

    专利类型

  • 公开/公告日2012-07-09

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20090044951

  • 发明设计人 고동진;박성령;양승한;

    申请日2009-05-22

  • 分类号G01B11/26;G01B9/02;G02B5/00;

  • 国家 KR

  • 入库时间 2022-08-21 17:07:52

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