首页> 外国专利> BIDIRECTIONAL ELECTROTHERMAL ELECTROMAGNETIC TORSIONAL MICROACTUATORS

BIDIRECTIONAL ELECTROTHERMAL ELECTROMAGNETIC TORSIONAL MICROACTUATORS

机译:双向电热扭转微致动器

摘要

PURPOSE: A micro-actuators for a bidirectional driven electrothermal device and a method of manufacturing the same are provided to drive a micro-mirror in bidirectional by applying electromagnetic field from the outside to control the direction of the fixed beam. CONSTITUTION: A mirror(102) comprises a reflecting surface. Incident light is reflected from the reflecting surface. Torsion bars(104a,104b) are arranged on the rotation center axis of the mirror. The torsion bars are connected to the both sides of the mirror. Torsion bar anchors supports the torsion bar. A pair of buckling beams are connected to the both sides of the mirror and are faced with each other. The buckling beam anchors support the buckling beam.
机译:目的:提供了一种用于双向驱动电热装置的微致动器及其制造方法,以通过从外部施加电磁场来控制固定光束的方向来双向驱动微镜。组成:一面镜子(102)包括一个反射面。入射光从反射面反射。扭杆(104a,104b)布置在镜子的旋转中心轴上。扭杆连接到镜子的两侧。扭力杆锚支撑扭力杆。一对屈曲梁连接到镜子的两侧并彼此面对。屈曲梁锚固件支撑屈曲梁。

著录项

  • 公开/公告号KR101176698B1

    专利类型

  • 公开/公告日2012-08-23

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20090016842

  • 发明设计人 김종백;은영기;나형주;

    申请日2009-02-27

  • 分类号G02B26/08;

  • 国家 KR

  • 入库时间 2022-08-21 17:07:34

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