EVAPORATING SOURCE WHICH IS EASILY EXCHANGEABLE CAPABLE OF SELECTING A MALFUNCTIONED EVAPORATION SOURCE AND REPLACING ONLY THE MALFUNCTIONED EVAPORATION SOURCE AND AN EVAPORATING SYSTEM

摘要

PURPOSE: An evaporating source which is easily exchangeable and an evaporating system are provided to greatly extend continuous operation time when evaporation sources are successively used by installing an extra evaporation source inside a vacuum chamber.;CONSTITUTION: An evaporation source(50) is installed inside a chamber. A plug(51) supports the evaporation source at the lower of the evaporation source. The plug is inserted into a concentric plug(61) of a base plate(60). The base plate supplies power to the evaporation source. A plurality of concentic plugs is formed on the upper of the base plate.;COPYRIGHT KIPO 2012