ORGANIC ANTIREFLECTIVE COATING COMPOSITION HAVING EXCELLENT CHARACTERISTIC OF GAP FILLING AND ORGANIC ANTIREFLECTIVE LAYER MANUFACTURED BY THE COMPOSITION

摘要

PURPOSE: An organic anti-reflective layer composition and an organic anti-reflection layer manufactured using thereof are provided to enhance embedded property and absorbing property. CONSTITUTION: An organic anti-reflective layer composition comprises 0.1-40 weight% of copolymers for organic anti-reflection layer which is represented by chemical formula(1), 0.1-40 weight% of absorber, 0.01-20 weight% of thermal acid generator, and 0.01-40 weight% of hardener. In the chemical formula(1), R stands for hydrogen, C1-10 alkyl, C1-10 alcohol, C2-8 alkylester, C2-8 heteroalkyl, or C4-14 cycloalkyl. m and n respectively stand for number showing recurring unit. The sum of m and n is 1, m and n are respectively larger than 0.05 and smaller than 0.95.