실리콘 단결정 잉곳 형성장치용 가열로 승하강 유닛 및 이를 구비한 실리콘 단결정 잉곳 형성장치

摘要

the present invention is heated to a molten state of the silicon within the silicon single crystal ingot grown by impression so as to low and as for the high-speed mode (Run / Fast Mode) by selectively applying to the elevating unit to heat the furnace for W, lowering, and more particularly, to a heating w, that is with a view to lowering the heating interlocking screw and applied the two motors and drive transmission structure for each individual operation mode, the ball nut, W of the furnace, it is possible to minimize the lowering vibration, the silicon single crystal ingot formed by the individual motor and the drive transmission portion so as to facilitate replacement of older is heated on the elevating unit and a silicon single crystal ingot to the forming apparatus having the same for the device. The present invention includes each of the low- and high-speed motor for elevating the heating unit, and each motor is linked to be operating a ball screw and ball nut, and the furnace but substituting separately, by ensuring that one of the other motor when the drive motor is fixed , independently of the heating in accordance with the rotation of the motor W, the falling and mechanically stable, in the furnace W, the vibration that occurs when the falling is minimized, only the respective motor and drive transmission components when more than one unit of the apparatus replacement is easy, has the effect of reducing the maintenance cost. ;