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이중가이더를 구비하는 실리콘 단결정 잉곳 형성장치

机译:具有双导向器的硅单晶锭成型装置

摘要

PURPOSE: A silicon monocrystal ingot forming apparatus comprised of a double guider is provided to suppress vibrations delivered through a wire and minimize a swing effect, thereby minimizing faults in product production by a warped rotation axis from silicon monocrystal ingot growing. CONSTITUTION: A crucible(110) contains a silicon solution. A reaction chamber(100) includes a heater and a heat shield. The heater heats the crucible and is surrounded by the heat shield. The heat shield blocks the heat generated from the heater. A chamber ascending/descending unit(200) is comprised of a support stand, a shaft axis(210), and a driving part and ascends/descends/rotates the reaction chamber in one direction. The shaft axis is connected to the support stand which is supporting the reaction chamber. A wire pulling unit(300) winds and pulls a wire by a motor and rotates the wire in opposite direction to a rotating direction of the reaction chamber. A seed connection chuck in the lower end part of the wire is installed in the upper part of the reaction chamber. A seed crystal which is raising a monocrystal ingot is connected to the seed connection chuck. A wire maintenance part(400) has a double guider structure which is separated with a fixed interval in up and down following the wire length direction. The wire maintenance part is fixed in the support stand in order to be located between the wire pulling unit and the reaction chamber. A jig hole where the wire is passing through is formed at each center of guider and prevents shaking when pulling or rotating the wire.
机译:目的:提供一种由双导向器构成的单晶硅锭形成设备,以抑制通过金属丝传递的振动并使摆动效应最小,从而使单晶硅锭生长引起的旋转轴弯曲产生的产品生产故障最小化。组成:坩埚(110)包含硅溶液。反应室(100)包括加热器和隔热罩。加热器加热坩埚,并被隔热罩包围。隔热罩阻挡了加热器产生的热量。腔室上升/下降单元(200)由支架,轴(210)和驱动部构成,并且使反应腔室沿一个方向上升/下降/旋转。轴的轴线连接至支撑反应室的支撑架。线材牵引单元(300)通过电动机卷绕并牵引线材,并使线材在与反应室的旋转方向相反的方向上旋转。线材的下端部分中的种子连接卡盘安装在反应室的上部。使单晶锭长起的籽晶连接到籽晶连接卡盘。电线维护部(400)具有双重导向器结构,该双重导向器结构沿电线长度方向在上下方向上以固定间隔分开。线材维护部件固定在支撑架中,以便位于线材牵引单元和反应室之间。导线穿过的夹具孔形成在导向器的每个中心,可防止在拉动或旋转导线时晃动。

著录项

  • 公开/公告号KR101134499B1

    专利类型

  • 公开/公告日2012-04-13

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20100008308

  • 发明设计人 김용욱;

    申请日2010-01-29

  • 分类号C30B15/30;C30B29/06;H01L21/02;

  • 国家 KR

  • 入库时间 2022-08-21 17:08:15

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