A support device for supporting a growing single crystal made of semiconductor material, and a method of producing a single crystal

摘要

A support device (1) to support a thickened portion (82) on the neck (81) of a single crystal (8) consisting of semiconductor material in a according to the czochralski crucible pulling process operating equipment, wherein the assistance device (1) in its lower region of a support device (121, 122) with a central opening, in this central opening in a horizontal plane, a circle having a diameter d₁ writing can be incorporated, whose center point on a vertical axis (16), and wherein the support member (121, 122) by means of one or more connecting elements (132, 133, 134) with at least one above the supporting element (121, 122) arranged fastening element (14) is connected, which is suitable for fastening to a lifting device (2) of the equipment, with the connecting elements (132, 133, 134) are arranged such that they in the area directly above the supporting element (121, 122) can be a free space, into which in any desired horizontal plane a circle with a centre point on the axis (16) and a diameter..