Piezoresistive sensing element for resilient fastening of mass element of acceleration sensor, has equaled portions which are separated by separation element for differential measurement of mechanical stress caused by acceleration

摘要

The sensing element (12) has two equaled portions (24,26) which are separated from each other by a galvanic/mechanical separation element (28) of the piezoresistive structures (30,32), for differential measurement of mechanical stress caused by acceleration. An intermediate region (40) is electrically insulated by the essentially equaled portions. The separation element is provided with a trench formed by ion etching, whose inside walls are provided with insulating layers (34,36). Independent claims are included for the following: (1) acceleration sensor; and (2) manufacturing method of piezoresistive sensing element.