Sensor module i.e. acceleration sensor, manufacturing method, for measuring e.g. acceleration, in motor car, involves applying metallic support on temporary support, and switching circuit contacting contacting area by re-wiring layer

摘要

The method involves applying a metallic support (2) on a temporary support, and directly arranging an integrated switching circuit on the temporary support. A micro-electromechanical element is indirectly arranged on the temporary support, where the micro-electromechanical element contacts a contacting area (1) of the metallic support by a wire bond. The integrated switching circuit is in contact with the contacting area by a re-wiring layer, and the micro-electromechanical element is arranged on the integrated switching circuit. An independent claim is also included for a sensor module comprising an integrated switching circuit.