Supporting device for a magnetron arrangement having a rotating target, comprises a drive shaft, at which a first end for connecting to the rotating target is formed and a second end for introducing a torque is formed, and a drive unit

摘要

The supporting device for a magnetron arrangement having a rotating target (3), comprises a rotatable drive shaft (41), at which a first end for connecting to the rotating target is formed and a second end for introducing a torque is formed, and a drive unit having a stator (23) and a rotor (22) for generating the torque, where the rotor is connected with the drive shaft for transmitting the torque. The rotor is arranged within system chamber (1) prevailing pressure conditions and directly arranged on the drive shaft, so that the drive shaft is a rotor shaft of the drive unit. The supporting device for a magnetron arrangement having a rotating target (3), comprises a rotatable drive shaft (41), at which a first end for connecting to the rotating target is formed and a second end for introducing a torque is formed, and a drive unit having a stator (23) and a rotor (22) for generating the torque, where the rotor is connected with the drive shaft for transmitting the torque. The rotor: is arranged within system chamber (1) prevailing pressure conditions and directly arranged on the drive shaft, so that the drive shaft is a rotor shaft of the drive unit; and comprises the rotor shaft with which the drive shaft for transmitting the torque is associated. The stator is arranged out of the system chamber prevailing pressure conditions. The drive unit comprises a separation element that hermetically separates the rotor and the stator from one another. The separating element: is connected with a chamber wall of the system chamber in a gas-tight manner or with a housing wall of a housing end block; extends outwards and inwards from the chamber wall or housing wall; and is a flat disc, which is sealed in an opening of the chamber wall or housing wall, and is made of a nonmagnetic material. A gearbox is arranged between the rotor and the drive shaft. The drive shaft is made of electrically non-conductive material.