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Method for determining absolute position of measuring head of portal machine in e.g. automated production plant, involves determining absolute position of object based on coarse-information and phase shift

机译:用于确定门机的测量头的绝对位置的方法例如自动化生产工厂,涉及根据粗略信息和相移确定对象的绝对位置

摘要

The method involves detecting intensity of a measuring signal after traversing a measuring path (8) as a function of time so as to determine coarse-information for length of the measuring path. Phase shift between an interferometer-object beam and an interferometer-reference beam based on intensity of an interference signal, which is produced by superimposition of the interferometer-object beam and the interferometer-reference beam, where the phase shift is associated with the measuring path. An absolute position of an object (15) is determined based on the information and the phase shift. An independent claim is also included for a device for determining an absolute position of an object.
机译:该方法包括在经过测量路径(8)之后检测测量信号的强度作为时间的函数,以便确定测量路径的长度的粗略信息。基于干涉信号的强度,干涉仪-目标光束和干涉仪-参考光束之间的相移是通过干涉仪-目标光束和干涉仪-参考光束的叠加产生的,其中相移与测量路径相关。基于该信息和相移来确定物体(15)的绝对位置。还包括用于确定对象的绝对位置的设备的独立权利要求。

著录项

  • 公开/公告号DE102010062842A1

    专利类型

  • 公开/公告日2012-06-14

    原文格式PDF

  • 申请/专利权人 CARL ZEISS AG;

    申请/专利号DE20101062842

  • 发明设计人 ALVAREZ DIEZ CRISTINA;SPRUCK BERND;

    申请日2010-12-10

  • 分类号G01B11/03;G01B9/02;G01B11/00;G01B11/14;G01S17/10;

  • 国家 DE

  • 入库时间 2022-08-21 17:05:13

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