Measuring probe for measuring properties of substrate, has heating unit and temperature sensors that are arranged on main portion, to detect thermodynamic properties of to-be-examined substrate

摘要

The measuring probe has a main portion (100) with a pressure-measuring unit (1) that detects storage density of to-be-examined substrate (U). The heating unit (2) and temperature sensors (3,3') are arranged on the main portion, to detect the thermodynamic properties of to-be-examined substrate. An independent claim is included for method for measuring properties of substrate.